3DHALL 3-Axis Hall Magnetic Sensor

The SENM3Dx is a CMOS magnetic field sensor that allows the acquisition of all three magnetic-field components (Bx, By and Bz) at the same time and at the same spot. The sensor incorporates three groups of mutually orthogonal Hall-effect elements (one horizontal and two vertical) with biasing circuits and amplifiers for each of them. The integrated Hall elements are very compact and occupy a small area of about 100 x 100 μm2. This allows for very high spatial resolution of the sensor. The applied CMOS technology enables high precision in the fabrication of the vertical and horizontal Hall elements, which gives high angular accuracy (orthogonality) of the three-measurement axis. The application of the spinning-current technique in the biasing of the Hall elements significantly suppresses offset, low-frequency noise, and the planar Hall effect. The sensor provides high analog bandwidth from DC to 300kHz. A built-in temperature sensor allows to measure the current chip temperature at the field sensitive volume.